Applications of Fiber Optics Sensors in Seismology
Simulation Analysis of Fiber Optic Magnetic Sensor
Enhancement of excited-state emission of InAs/GaAs quantum dots with larg...
Self-Powered SnS1-xSex Alloy/Silicon Heterojunction Photodetectors with H...
Mode and lasing characteristics for scissor-FP hybrid-cavity semiconducto...
14 mu m quantum cascade lasers based on diagonal transition and nonresona...
Exploring the Designs of p-Type Piezoelectric FinFETs Based on NEGF Trans...
Insulator-metal transition and ultrafast crystallization of Ga40Sb60/Sn15...
Atomic mechanism of strong interactions at the graphene/sapphire interface
Self-catalyzed growth of GaSb nanowires for high performance ultraviolet-...
官方微信
友情鏈接

A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer

2019-11-01

Authors: Yang, J; Zhang, M; Si, CW; Han, GW; Ning, J; Yang, FH; Wang, XD

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Volume: 28 Issue: 5 Pages: 776-781 Published: OCT 2019 Language: English Document type: Article

DOI: 10.1109/JMEMS.2019.2924956

Abstract:

In this paper, we report a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer. The spring beams are T-shaped with two masses hanged at the end. This accelerometer is sensitive to the z-axis acceleration due to a thin thickness. Different from the working mechanism of the ordinary MEMS resonant accelerometers, masses of this accelerometer are excited to resonate in-plane. In addition the stiffness of spring beams changes significantly when an out plane (z-axis) inertial force applied on the structure. Therefore,the resonant frequency of the structure will change with the out-plane inertial force. The resonant properties and sensitivities of this AlN accelerometer are simulated by COMSOL Multiphysics. The accelerometer is fabricated and tested. The size of the whole structure is 464 x 650mu m(2). The resonant frequency is 16.10925 kHz at the static state. The sensing-axis sensitivity of this accelerometer is 1.11 Hz/g (i.e.,68.9 ppm/g) tested from -5g to +5g. The linearity of the accelerometer is 0.9954. The cross-axis sensitivities are 0.053 Hz/g (x-axis) and 0.048 Hz/g (y-axis) respectively. The temperature coefficient of frequency (TCF) of this accelerometer is 0.815 Hz/ degrees C (i.e., 50.6ppm/degrees C), tested from 0 degrees C to 50 degrees C.

Full Text: https://ieeexplore.ieee.org/document/8777324



關于我們
下載視頻觀看
聯系方式
通信地址

北京市海淀區清華東路甲35號 北京912信箱 (100083)

電話

010-82304210/010-82305052(傳真)

E-mail

[email protected]

交通地圖
版權所有 ? 中國科學院半導體研究所

備案號:京ICP備05085259號 京公網安備110402500052 中國科學院半導體所聲明

快乐十分历史开奖 2012中甲即时比分 股票配资什么意思 南粤36选7 正规配资平台 河北20选5 国内的期货配资公司 20年上证指数走势图 怎样操作股票融资 股票融资=鑫配资 短期保本理财产品排行 finnciti游戏理财平台 北单比分奖金计算器 7m网球比分直播 私募基金配资是什么意思 广西十一选五 股票融资 配资