Applications of Fiber Optics Sensors in Seismology
Simulation Analysis of Fiber Optic Magnetic Sensor
Enhancement of excited-state emission of InAs/GaAs quantum dots with larg...
Self-Powered SnS1-xSex Alloy/Silicon Heterojunction Photodetectors with H...
Mode and lasing characteristics for scissor-FP hybrid-cavity semiconducto...
14 mu m quantum cascade lasers based on diagonal transition and nonresona...
Exploring the Designs of p-Type Piezoelectric FinFETs Based on NEGF Trans...
Insulator-metal transition and ultrafast crystallization of Ga40Sb60/Sn15...
Atomic mechanism of strong interactions at the graphene/sapphire interface
Self-catalyzed growth of GaSb nanowires for high performance ultraviolet-...

A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer


Authors: Yang, J; Zhang, M; Si, CW; Han, GW; Ning, J; Yang, FH; Wang, XD


Volume: 28 Issue: 5 Pages: 776-781 Published: OCT 2019 Language: English Document type: Article

DOI: 10.1109/JMEMS.2019.2924956


In this paper, we report a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer. The spring beams are T-shaped with two masses hanged at the end. This accelerometer is sensitive to the z-axis acceleration due to a thin thickness. Different from the working mechanism of the ordinary MEMS resonant accelerometers, masses of this accelerometer are excited to resonate in-plane. In addition the stiffness of spring beams changes significantly when an out plane (z-axis) inertial force applied on the structure. Therefore,the resonant frequency of the structure will change with the out-plane inertial force. The resonant properties and sensitivities of this AlN accelerometer are simulated by COMSOL Multiphysics. The accelerometer is fabricated and tested. The size of the whole structure is 464 x 650mu m(2). The resonant frequency is 16.10925 kHz at the static state. The sensing-axis sensitivity of this accelerometer is 1.11 Hz/g (i.e.,68.9 ppm/g) tested from -5g to +5g. The linearity of the accelerometer is 0.9954. The cross-axis sensitivities are 0.053 Hz/g (x-axis) and 0.048 Hz/g (y-axis) respectively. The temperature coefficient of frequency (TCF) of this accelerometer is 0.815 Hz/ degrees C (i.e., 50.6ppm/degrees C), tested from 0 degrees C to 50 degrees C.

Full Text:


北京市海淀區清華東路甲35號 北京912信箱 (100083)




[email protected]

版權所有 ? 中國科學院半導體研究所

備案號:京ICP備05085259號 京公網安備110402500052 中國科學院半導體所聲明

快乐十分历史开奖 快乐十分奖金表格 pk10稳赢技巧 一定牛上海十一选五预测 11选5河南最新开奖今天 极速赛车预测计划软件 四肖选一肖期期准首页 今年连续涨停的股票 最新的时时彩app下载 pk10开奖结果 彩吧论坛首页一彩票论坛 快乐双彩今晚开奖结果 二分彩好的购彩方法有吗 上海11选五开奖结果一定牛 黄金股票 吉林快3走势图360 腾讯分分彩开奖号